Mini UHV Gate Valve SERIES 01.0
Multi-purpose valves from UHV to advanced applications.
- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal
- Company:VAT
- Price:Other
1~11 item / All 11 items
Multi-purpose valves from UHV to advanced applications.
- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal
A gate valve ideal for applications requiring minimal particle generation and low vibration.
- Minimal shock - Low particle generation - Vacuum section and mechanism are isolated - Vulcanized gate seal - Long life cycle
Extremely short control response time, and easy to use with a compact design.
- Excellent pressure control capability - Equipped with limit switch - Service port equipped (for PC connection or service box connection)
High throughput due to short opening and closing times.
- Low holding costs - High throughput due to short opening and closing times - Customer-specified design
High vacuum gate valve capable of opening and closing operations at a differential pressure of 0.1 MPa.
The valve can open and close with a differential pressure of 0.1 MPa. - High vacuum gate valve for vacuum sealing applications - Can be opened and closed even with a pressure difference due to the wedge seal.
VATLOCK system vacuum gate valve
Valves for research and development and low vacuum applications in industry - Gate valve with VATLOCK system that securely seals even in back pressure situations with mechanical locking - Structure that does not burden the pump due to low vibration thanks to air damping - Easy to remove and maintain - Low cost
Vacuum shut-off valve for pumps/chambers that can be used in semiconductor and surface analysis applications.
- Low particle generation - Easy maintenance - Low cost
It can be baked at an open position of 250°C and a closed position of 200°C to remove moisture and maintain an ultra-vacuum state. The seal directly adheres to the plate, preventing the accumulation of debris.
-No lubricant required -Vulcanized seal for DN 63-200 -Easy maintenance
Can be baked up to 300°C in open and closed positions, suitable for harsh environments.
- Durable and long life cycle - Mechanical lock in closed position - Radiation resistance performance - "Hard on hard" sealing
Design adapted to harsh processes and high temperatures.
- High throughput due to short opening and closing times - Designed for harsh processes and high temperatures - Small distance between the flange faces of the valve
Large square gate valve capable of high-speed operation with lightweight components.
- High operating speed with lightweight components - No system downtime during maintenance - Three different service positions - Safety mode during maintenance